Beam position monitor
US6596994B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 21, 2000 |
| Grant date | Jul 22, 2003 |
| Priority date | — |
| Expiry date | Aug 4, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01T1/29
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
An apparatus for determining the position of an x-ray beam relative to a desired beam axis. Where the apparatus is positioned along the beam path so that a thin metal foil target intersects the x-ray beam generating fluorescent radiation. A PIN diode array is positioned so that a portion of the fluorescent radiation is intercepted by the array resulting in an a series of electrical signals from the PIN diodes making up the array. The signals are then analyzed and the position of the x-ray beam is determined relative to the desired beam path.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.