Grating-assisted co-directional vertical coupler optical filter having well-suppressed sidelobe characteristics and method of fabricating the same
US6597838B1 · kind B1 · utility
Assignees
Inventors
Key dates
| Filing date | Aug 18, 1998 |
| Grant date | Jul 22, 2003 |
| Priority date | — |
| Expiry date | Aug 18, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12147
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to an optical filter whose a sidelobe disturbing a characteristic of an optical filter by weighting an optical coupling efficiency between waveguides is controlled upon applying a selective area growth method in a wavelength selective variable semiconductor optical filter and method of fabricating the same. The present invention can control the thickness of growth layer selectively by controlling the width of the dielectric thin film mask whose the growth is not achieved in the selective area growth method, can control the distance between two waveguides of the wavelength selective variable semiconductor optical filter by applying the result on the distance control between two waveguides. Accordingly, there can be changed an optical coupling efficiency between two waveguides spatially. Because the sidelobe characteristics is largely improved if the distance between two waveguides is controlled temporarily to be corresponded to one period of Hamming function, there can be fabricated a semiconductor optical filter whose the characteristic is very excellent when applying the present invention.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.