Capacitive vacuum sensor
US6598483B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 9, 2001 |
| Grant date | Jul 29, 2003 |
| Priority date | — |
| Expiry date | Mar 9, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0042
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive vacuum sensor includes a non-conducting substrate, a plurality of fixed electrodes on the non-conducting substrate, and a diaphragm electrode formed by a plurality of elastic structures, each of the elastic structures being arranged to oppose a respective one of the fixed electrodes and having a different physical size (area) that is the same as that of each corresponding fixed electrode. More specifically, the areas of the elastic structures have a specific relationship between them, as defined by a specific ratio, and the areas may differ successively from each other according to the specific ratio. The capacitive vacuum sensor further includes compensation electrodes that are not sensitive to any change in the capacitance that may occur in response to any change in the pressure, but is only sensitive to any change in the capacitance that may occur in response to any change in the temperature. The elastic structures forming the diaphragm electrode have a plurality of projections on the surfaces to detach the elastic structures, which have been pressed against by the corresponding fixed electrodes under the higher pressure, away from the corresponding fixed electrodes…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.