Multi-layer thermal actuator with optimized heater length and method of operating same
US6598960B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 23, 2002 |
| Grant date | Jul 29, 2003 |
| Priority date | — |
| Expiry date | May 23, 2022 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D33/00
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
An apparatus for and method of operating a thermal actuator for a micromechanical device, especially a liquid drop emitter such as an ink jet printhead, is disclosed. The disclosed thermal actuator comprises a base element and a cantilevered element extending a length L from a base element and normally residing at a first position before activation. The cantilevered element includes a barrier layer constructed of a dielectric material having low thermal conductivity, a first deflector layer constructed of a first electrically resistive material having a large coefficient of thermal expansion and patterned to have a first uniform resistor portion extending a length LH1 from the base element, wherein 0.3L≦LH1≦0.7L, and a second deflector layer constructed of a second electrically resistive material having a large coefficient of thermal expansion and patterned to have a second uniform resistor portion extending a length LH2 from the base element, wherein 0.3L≦LH2≦0.7L, and wherein the barrier layer is bonded between the first and second deflector layers. The thermal actuator further comprises a first pair of electrodes connected to the first uniform resistor portion and a …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.