Sensor for non-contacting electrostatic detector
US6600323B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 24, 2001 |
| Grant date | Jul 29, 2003 |
| Priority date | — |
| Expiry date | Aug 24, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R29/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor for an electrostatic detector including an elongated vibratory element supported at a mechanical node at one end in the manner of a cantilever beam, a sensitive electrode on the vibratory element near the other end and adapted to be disposed toward an electrical charge, field or potential being measured, and a driver transducer on the vibratory element for vibrating the element in a direction to vary the capacitive coupling between the electrode and the electrical charge, field or potential being measured. An amplifier and the sensitive electrode are combined in an assembly on the vibratory element thereby providing a low impedance amplifier output which in turn allows a narrow spacing around the vibratory element to prevent entry of contaminants. The vibratory element can be provided with a structure which allows measurements with various spatial resolution characteristics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.