Micromirror array having adjustable mirror angles
US6600591B2 · kind B2 · utility
53Cited by
23References
35Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 12, 2001 |
| Grant date | Jul 29, 2003 |
| Priority date | — |
| Expiry date | Dec 3, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/904
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method and system are provided for operating an array of such optical micromirrors. Electrodes associated with each of a plurality of optical micromirrors within the array are sequentially actuated by applying a voltage to each such electrode for a fixed time. The voltage applied to each of the electrodes is selected so that the optical micromirror with which that electrode is associated is positioned in a certain tilted position. The step of sequentially actuating electrodes is repeated to maintain the tilted positions of the plurality of optical micromirrors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.