MEMS optical switch with a notched latching apparatus for improved mirror positioning and method of fabrication thereof
US6600850B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 25, 2000 |
| Grant date | Jul 29, 2003 |
| Priority date | — |
| Expiry date | Sep 20, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12104
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In at least one embodiment, the apparatus includes an actuator arm, a mirror structure, and a latch mounted between the arm and the mirror structure. The latch has a first end mounted to the arm and a fastener connected to the mirror structure. The fastener has a fastener support surface and a fastener side surface, where the fastener support surface is in contact with the mirror structure. The fastener support surface and the fastener side surface are angled to each other to define a fastener corner. At the fastener corner is a fastener notch. Likewise, the mirror structure can include a catch for receiving the latch on a substantially flat catch support surface, which is created by a catch notch at the corner of the catch support and side surfaces. In at least one embodiment, the method includes steps of fabrication of the apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.