Patent · US Expired

Semiconductor apparatus including CMOS circuits and method for fabricating the same

US6603179B2 · kind B2 · utility

7Cited by
3References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 28, 2001
Grant dateAug 5, 2003
Priority date—
Expiry dateNov 28, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D84/856

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.