Two-dimensional positioning apparatus and method for measuring laser light from the apparatus
US6603562B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 21, 2000 |
| Grant date | Aug 5, 2003 |
| Priority date | — |
| Expiry date | Mar 29, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K2201/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A two-dimensional positioning apparatus for positioning an object in a two dimensional direction, wherein are provided a platen, a slider having two X-axis motors and sensors and a Y-axis motor and sensor disposed above the platen, a converter for providing signals to detect the X-axis position of the center point of the slider, a controller for feedback control of the slider in a X-axis direction and a yaw direction, and for feedback control in the Y-direction, and a converter circuit for converting output of the controller to propulsion commands to be supplied to the motors, wherein a limiter is provided to restrict one axis limits of the propulsion commands. In this manner, accuracy is improved and flexibility is increased.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.