Microelectromechanical correlation device and method
US6604425B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 9, 2000 |
| Grant date | Aug 12, 2003 |
| Priority date | — |
| Expiry date | Jun 9, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/086
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for comparing a force to a signal, or comparing two signals, through mechanical movement of capacitive plates in a transducer. The transducer plates are separated by d, which in one embodiment is preferably a linear function of a pressure or force F. In that embodiment, application of a signal i(t+&tgr;) to the plates will cause a voltage representing a correlation between F and i to appear between the plates. In another embodiment, instead of an external mechanical force or pressure, an electrical signal V related to a signal S may drive the transducer plates to achieve a voltage indicating a correlation between S and the signal input i(t+&tgr;). Transducers to practice the invention may be microelectromechanical devices fabricated using integrated circuit techniques to permit small size and low cost.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.