Vaporizer
US6604492B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2002 |
| Grant date | Aug 12, 2003 |
| Priority date | — |
| Expiry date | Feb 28, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87885
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A vaporizer is provided for delivering vapor streams such as high purity streams to a processing destination, such as a wafer processing chamber. The vaporizer includes a heated base having one or more seamless slots formed in one of its faces for carrying a liquid which is vaporized by heat from the heated plate. In one embodiment, the vaporizer includes an atomizer for atomizing the liquid prior to vaporization to reduce the temperature of vaporization. In one embodiment, the vaporizer includes a heat exchanger having cross-slots intersecting a plurality of seamless slots to reduce unvaporized liquid from exiting the vaporizer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.