Method and apparatus for collecting rare gas
US6605134B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 14, 2001 |
| Grant date | Aug 12, 2003 |
| Priority date | — |
| Expiry date | Sep 14, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2259/402
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
There is provided a method and an apparatus for collecting a rare gas, which are capable of effectively collecting the rare gas contained in an exhaust gas exhausted from a rare gas using apparatus such as a plasma apparatus or the like, and moreover capable of securely supplying the rare gas having a predetermined purity to the rare gas using apparatus, and the method for collecting rare gas which comprises collecting a rare gas contained in an exhaust gas exhausted from a rare gas using apparatus operated under decompression, the method comprises the step of collecting the rare gas by separating the rare gas and impurities contained in the exhaust gas via at least two gas separating steps.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.