Method and apparatus for measuring characteristic of specimen and its application to high frequency response measurement with scanning probe microscopes
US6605941B2 · kind B2 · utility
51Cited by
4References
26Claims
0Family size
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Key dates
| Filing date | Mar 20, 2001 |
| Grant date | Aug 12, 2003 |
| Priority date | — |
| Expiry date | Mar 22, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/865
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for measuring a characteristic of a specimen, includes a probe for scanning a surface of the specimen in a noncontacting state, a vibrating unit for vibrating the probe, an excitation field generating unit for generating an amplitude modulation signal which is amplitude-modulated with a modulation frequency and a carrier frequency and producing an excitation field at the surface of the specimen on the basis of the generated amplitude modulation signal, and a measuring unit for measuring a force interaction between the probe and the specimen caused by the excitation field generated at the surface of the specimen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.