Angular-precision enhancement in free-space micromachined optical switches
US6606428B2 · kind B2 · utility
6Cited by
5References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 22, 2001 |
| Grant date | Aug 12, 2003 |
| Priority date | — |
| Expiry date | Aug 22, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3518
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Integrated mechanical angular alignment-enhancement structures for incorporation into free-space micromachined optical switches are capable of achieving better than 0.1° micro-mirror angular precision and repeatability with the optical switches. The structures open the path to high port-count crossconnects with sufficiently low loss for deployment in practical optical-communications networks.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.