Pressure sensors
US6606911B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 5, 2001 |
| Grant date | Aug 19, 2003 |
| Priority date | — |
| Expiry date | Dec 5, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0072
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor is formed by sandwiching a pressure-sensitive dielectric membrane between and in contact with a pair of electrodes. As pressure is applied, the dielectric constant of the pressure-sensitive membrane changes while the distance of separation between the pair of electrodes remains constant. This change in the dielectric constant is detected by a circuit as a change in the electrostatic capacitance between the electrodes to measure the applied pressure. Since the pressure-sensitive dielectric membrane is not required to undergo any elastic deformation for measuring the pressure, the pressure sensor can be made extremely thin.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.