Patent · US Expired

Positive photosensitive resin composition

US6607865B2 · kind B2 · utility

6Cited by
6References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 31, 2002
Grant dateAug 19, 2003
Priority date
Expiry dateFeb 1, 2022

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/0233
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

The present invention provides a positive photosensitive resin composition which can form a pattern of high resolution and high residual film ratio and has high sensitivity. That is, the present invention provides a positive photosensitive resin composition comprising 100 parts by weight of a polyamide resin and 1 to 50 parts by weight of a photosensitizer represented by, for example, the following formula (Q-1):

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.