High-sensitivity flexible ceramic sensor
US6608427B2 · kind B2 · utility
9Cited by
15References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 9, 2002 |
| Grant date | Aug 19, 2003 |
| Priority date | — |
| Expiry date | Sep 9, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/302
Abstract
Disclosed is a high-sensitivity flexible ceramic sensor for detecting mechanical shocks and vibrations, which comprises a metal foil of a specified thickness as a substrate, a single-crystalline thin film of a piezoelectric ceramic material such as aluminum nitride and zinc oxide having a specified thickness formed on the substrate, a metallic electrode formed on the thin ceramic film and an external circuit connecting the metal foil and the electrode with insertion of an electric meter for measuring the piezoelectric voltage changes induced in the ceramic thin film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.