Cathode target mounting for cathodic arc cathodes
US6608432B2 · kind B2 · utility
4Cited by
4References
41Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 3, 2001 |
| Grant date | Aug 19, 2003 |
| Priority date | — |
| Expiry date | Aug 24, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32724
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus for cathodic arc coating. The apparatus includes: a vacuum chamber which includes an anode; a power supply; and a cathode target assembly connected to the power supply. The cathode target assembly includes a cathode target and a target holder. In the preferred embodiment, a conductive interlayer is located between the cathode target and the target holder, and a cooling block is in contact with the cathode target.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.