Pressure sensor
US6609426B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 25, 2000 |
| Grant date | Aug 26, 2003 |
| Priority date | — |
| Expiry date | Oct 25, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0048
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor comprises a sensor diaphragm which on one of its surfaces can be acted upon by the fluid pressure to be defected. The sensor diaphragm is rigidly supported at its opposite surface. It is made of an elastomeric material of an electrically non-conducting material wherein fine particles of electrically conducting material are homogenously embedded and distributed in such a density that a compression of the sensor diaphragm caused by the fluid pressure results in a measurable change in its electrical resistivity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.