Filters employing porous strongly acidic polymers
US6610128B2 · kind B2 · utility
7Cited by
49References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 24, 2002 |
| Grant date | Aug 26, 2003 |
| Priority date | — |
| Expiry date | Jun 24, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S55/05
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A clean, high efficieny, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite has a porous sulfonated divinyl benzene styrene copolymer beads having sulfonic acid functional side groups. The non-woven filter is used to remove molecular bases, including ammonia, organic amines, inides, aminoalcohols, alcoholoamines from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.