Optical pressure sensor
US6612174B2 · kind B2 · utility
20Cited by
55References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 9, 2001 |
| Grant date | Sep 2, 2003 |
| Priority date | — |
| Expiry date | Apr 14, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L13/026
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor configured to sense an applied pressure, comprising a diaphragm support structure, a diaphragm coupled to the diaphragm support structure and configured to deflect in response to applied pressure, a moveable member coupled to the diaphragm and configured to move in response to deflection of the diaphragm, and an optical interference element coupled to the moveable member and configured to interfere with incident light, wherein the interference is a function of position of the moveable member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.