Sensor usable in ultra pure and highly corrosive environments
US6612175B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 20, 2000 |
| Grant date | Sep 2, 2003 |
| Priority date | — |
| Expiry date | Jul 20, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0681
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor operable at temperatures in excess of 400° C. is described. The sensor of the present invention operates without fluid fill, is non-porous, non-contaminating, and has no exterior exposed metallic components. The sensor includes a non-porous, impermeable sensing diaphragm that may be positioned in direct contact with fluids in an ultra-pure environment. The non-porous surface may be comprised of a layer of single crystal sapphire that is glassed to a backing plate. The sensor of the present invention is suitable for use in a chemically inert pressure transducer module for sensing pressures and/or temperatures in process fluids and may be molded directly into the high temperature plastic housing of the pressure transducer module.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.