System and method for self-calibrating measurement
US6612737B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 29, 1999 |
| Grant date | Sep 2, 2003 |
| Priority date | — |
| Expiry date | Dec 29, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K15/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides systems and methods for self-calibrated measurements, for example temperature sensing. The system includes a controller, a multiplexer of low on-resistance, at least two calibration reference resistors, and a current-to-frequency converter that performs self-calibrated temperature sensing with temperature sensing devices such as resistance temperature detectors (RTDs). In general, the system provides a self-calibrated temperature sensing by the current-to-frequency converter providing a constant voltage sequentially to at least two calibration resistors and one or more RTDs using switches of low on-resistance in the multiplexer, which is controlled by the controller. The value of one of the reference resistors provided is correlate to the resistive value of the RTD at the minimum temperature of the operating temperature range for the processing equipment to be monitored, the value of another reference resistor provided is correlate to the resistive value of the RTD at the maximum temperature of the operating temperature range for the processing equipment, and the values of the remaining reference resistors, if provided, may correlate to the resistive …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.