Pretreatment process for a surface texturing process
US6613204B2 · kind B2 · utility
26Cited by
7References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 7, 2001 |
| Grant date | Sep 2, 2003 |
| Priority date | — |
| Expiry date | Jun 8, 2021 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/028
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Before submitting a sample, including a first material layered upon a substrate, to an ion milling process, whereby a second material is sputtered onto the surface of the first material and the sample is then submitted to an etching process, an irregularity is formed on the surface of the first material. The overall process results in the formation of cones, or micro-tip structures, which may then be layered with a layer of low work function material, such as amorphous diamond. The irregularity in the surface of the first material may be formed by polishing, sandblasting, photolithography, or mechanical means such as scratching.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.