Atomic layer controlled deposition on particle surfaces
US6613383B1 · kind B1 · utility
217Cited by
7References
26Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 21, 2000 |
| Grant date | Sep 2, 2003 |
| Priority date | — |
| Expiry date | Jun 21, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/2993
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Particles have an ultrathin, conformal coating are made using atomic layer deposition methods. The base particles include ceramic and metallic materials. The coatings can also be ceramic or metal materials that can be deposited in a binary reaction sequence. The coated particles are useful as fillers for electronic packaging applications, for making ceramic or cermet parts, as supported catalysts, as well as other applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.