Method for forming tungsten bit line and devices including the same
US6613670B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 18, 1999 |
| Grant date | Sep 2, 2003 |
| Priority date | — |
| Expiry date | Nov 18, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B12/485
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The method of the present invention includes providing a silicon substrate having an impurity region, forming an inter-layer insulating film having a contact hole in the impurity region and forming a titanium film and titanium nitride film in the contact hole. The method of the present invention further includes conducting a heat treatment to cause a reaction between the titanium film and the silicon substrate and forming a tungsten plug on the titanium nitride film in the contact hole. The device of the present invention including the bit lines are made up of a first inter-layer insulating film on the substrate having a first contact hole over the impurity region, a titanium film in the first contact hole, a titanium nitride film on the titanium film, a titanium silicide film on the silicon substrate wherein the titanium silicide film does not include an agglomerate, a tungsten plug on the titanium nitride film in the first contact hole and a circuit element on the first inter-layer insulating film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.