Patent · US Expired

Silver precursors for CVD processes

US6613924B1 · kind B1 · utility

2Cited by

5References

2Claims

0Family size

Assignee

Research Foundation of the State of New York · US

Inventors

John T. Welch · Akron, US
Silvana Ngo · Albany, US
Kulbinder Kumar Banger · Lakewood, US

Key dates

Filing date	Nov 23, 1999
Grant date	Sep 2, 2003
Priority date	—
Expiry date	Nov 23, 2019

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC07C49/92
WIPO fieldOrganic fine chemistry
WIPO sectorChemistry

Abstract

Organosilver complexes with &bgr;-diketonates and neutral coordinating ligands are useful as silver precursors in chemical vapor deposition processes. The &bgr;-diketonates include 1,1,1,5,5,5-hexafluoro-2,4-pentanedionate (hfac), acetylacetonate (acac), 2,2,6,6-tetramethyl-3,5-heptanedionate (tmhd), 1,1,1-trifluoro-2,4-pentanedionate, (tfac), 2,2,7-trimethyl-3,5-octanedionate (tmod), 1,1,1-trifluoro-5,5-dimethyl-2,4-pentanedionate (tfh) 1,1,1,2,2,3,3,7,7,8,8,9,9,9-tetradecafluoro-4,6-nonanedionate (tdf). Neutral coordinating ligands include triphenylphosphine, tributylphosphine, pyridine, tetramethylethanediamine (TMEDA) and tetramethylpropanediamine (TMPDA).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.