Patent · US Expired

Method for examining a specimen, and confocal scanning microscope

US6614031B2 · kind B2 · utility

18Cited by
4References
33Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 4, 2001
Grant dateSep 2, 2003
Priority date
Expiry dateFeb 13, 2022

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B21/008
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method for examining a specimen (11) by means of a confocal scanning microscope having at least one light source (1), preferably a laser, to generate an illuminating light beam (4) for the specimen (11), and a beam deflection device (9) to guide the illuminating light beam (4) over the specimen (11) comprises, in the interest of reliable definition of details or regions of interest of the specimen (11), the following method steps: Firstly a preview image is acquired. Then at least one region of interest in the preview image is marked. This is followed by allocation of individual illuminating light beam wavelengths and/or illuminating light beam power levels to the region or regions. Illumination of the region or regions of the specimen (11) in accordance with the allocation is then accomplished, at least one manipulation in at least one region (25) being performed by means of the illumination. Also described is a confocal scanning microscope having at least one light source (1), preferably a laser, to generate an illuminating light beam (4) for a specimen (11), and a beam deflection device (9) to guide the illuminating light beam (4) over the specimen (11), means for acquiring a …

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.