Diamond component with rear side contact and a method for the production thereof

US6614095B1 · kind B1 · utility

Assignee

• GFD Gesellschaft für Diamantprodukte mbH · DE

Inventors

• Mario Adamschik · Ulm, DE
• Erhard Kohn · Blaustein, DE
• Peter Gluche · Ulm, DE
• Alexander Kaiser · Neutraubling, DE

Key dates

• Filing date: Feb 2, 2001
• Grant date: Sep 2, 2003
• Expiry date: Feb 2, 2021

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/043
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

The invention relates to a component which has a function element arranged on a substrate the function element being electrically contacted in a contact region on its rear side facing the substrate. The substrate has an opening in the contact region and the rear side of the function element is coated with a contact metal.