Surface micro-planarization for enhanced optical efficiency and pixel performance in SLM devices
US6614576B2 · kind B2 · utility
8Cited by
4References
3Claims
0Family size
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Key dates
| Filing date | Dec 17, 2001 |
| Grant date | Sep 2, 2003 |
| Priority date | — |
| Expiry date | Dec 17, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for enhancing the optical performance of a reflective spatial light modulator by micro-planarizing surfaces within the SLM, such as the reflective surface of each pixel, by gas-cluster-ion-beam bombardment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.