Methods and apparatus for providing a multi-stop micromirror
US6614581B2 · kind B2 · utility
22Cited by
28References
28Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 3, 2001 |
| Grant date | Sep 2, 2003 |
| Priority date | — |
| Expiry date | Dec 25, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A microstructure is provided which facilitates alignment by allowing movement of the microstructure between one of a plurality of positions. The microstructure is included in an electromechanical machine which comprises a base layer, an actuator and two or more structural plates. One of the structural plates can be deflected to select a movement limit for the other structural plate. Methods for configuring the structural plates relative to each other to facilitate alignment are also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.