Method of making thin film magnetic head having upper auxillary magnetic pole of accurately set thickness
US6614621B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 4, 2001 |
| Grant date | Sep 2, 2003 |
| Priority date | — |
| Expiry date | Dec 4, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B2005/3996
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An upper auxiliary magnetic pole is formed in a space on a lower magnetic pole layer. A first insulating layer is then formed over the surface of the lower magnetic pole layer. The upper auxiliary magnetic pole is embedded within a swell formed on the surface of the first insulating layer. A second insulating layer is then formed over the surface of the first insulating layer. The second insulating layer has a property less abrasive than the first insulating layer. The second insulating layer is subjected to grinding over a wider area just after the swell has completely been removed. The abrasion can be suppressed at the thin film magnetic head in which the swell has been removed. The first insulating layer of a predetermined thickness reliably remains in each of the thin film magnetic heads on the wafer. An accurate adjustment of the thickness of the first insulating layer leads to a reliable establishment of a predetermined thickness in the upper auxiliary magnetic pole with less error.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.