Patent · US Expired

Feedback control system for a MEMS based optical switching fabric

US6614954B2 · kind B2 · utility

14Cited by
6References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 24, 2001
Grant dateSep 2, 2003
Priority date
Expiry dateOct 24, 2021

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B6/3556
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A control system for controlling individual mirrors in a MEMS-based optical switching fabric is presented. The control system includes a position sensitive detector positioned to receive a control beam reflected from individual mirrors of a first mirror array. In some embodiments, the control beam can be time-multiplexed with a calibration beam. The position of the control beam corrected in response to the position of the calibration beam can be compared with a position calculated on the port assignment of the individual mirrors in order to provide feedback to a feed-back based control system for the individual mirrors.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.