Ensemble manifold, system and method for monitoring particles in clean environments
US6615679B1 · kind B1 · utility
58Cited by
16References
7Claims
0Family size
Assignee
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Key dates
| Filing date | Aug 15, 2000 |
| Grant date | Sep 9, 2003 |
| Priority date | — |
| Expiry date | Nov 30, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/0046
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for detecting particles in a clean environment includes and ensemble manifold having a plurality of sample ports, a delivery port, and flow junction having no open-close valves or other flow selectors connecting all of said sample ports to said delivery port. In one embodiment, the ensemble manifold is mounted directly on a particle detector using a snap-on connector. A plurality of fluid sources are located in a clean environment, each of the fluid sources fluidically connected to one of the sample ports.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.