Method of manufacturing carbon nanotube field emitter by electrophoretic deposition
US6616497B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 26, 2000 |
| Grant date | Sep 9, 2003 |
| Priority date | — |
| Expiry date | Mar 6, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/847
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of manufacturing a carbon nanotube field emitter for field emission displays by electrophoresis is disclosed. The method of manufacturing involves: first, loading an electrode plate and the field emitter substrate, which are spaced apart from one another, into an electrophoresis bath containing a carbon nanotube suspension for the electrophoresis; second, applying a predetermined bias voltage from a power supply between the electrode plate and the cathodes of the field emitter substrate to deposit, at room temperature, carbon nanotube particles on the surface of the electrodes exposed through the holes of the dielectric film; and third, drawing the field emitter substrate, on which the carbon nanotube particles have been deposited, out of the electrophoresis bath, and heating the field emitter substrate with carbon nanotube tips at a predetermined temperature. An efficient low-temperature process, incorporating low cost carbon nanotube particles, provides for a lower manufacturing cost.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.