Silicon based substrate with a CTE compatible layer on the substrate
US6617037B2 · kind B2 · utility
24Cited by
2References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2001 |
| Grant date | Sep 9, 2003 |
| Priority date | — |
| Expiry date | Dec 19, 2021 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF05D2300/611
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An article comprising a substrate containing silicon and at least one layer which contains a coefficient of thermal expansion (CTE) tailoring additive in an amount sufficient to maintain a compatible CTE with at least one adjacent layer and the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.