Process and system for determining acceptibility of a fluid dispense
US6617079B1 · kind B1 · utility
10Cited by
4References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 19, 2000 |
| Grant date | Sep 9, 2003 |
| Priority date | — |
| Expiry date | Jun 19, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05C11/1007
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A process and system are provide for determining the acceptability of a fluid dispense such as a discrete volume of fluid used to coat a substrate. The fluid dispense is exposed to an energy source and the energy transmitted by the fluid dispense is detected to determine the shape of the fluid dispense. The fluid dispense shape and the timing of the beginning and end of the dispense are compared to previously generated standard dispense profiles and used to determine the acceptability of the shape and/or timing of the fluid dispense. The output from the sensor is used to control further processing of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.