Merged-mask micro-machining process
US6617098B1 · kind B1 · utility
4Cited by
26References
55Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 13, 1999 |
| Grant date | Sep 9, 2003 |
| Priority date | — |
| Expiry date | Jul 13, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/0109
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A merged-mask micro-machining process is provided that includes the application of a plurality of layers of masking material that are patterned to provide a plurality of etching masks.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.