Microelectricalmechanical system (MEMS) electrical isolator with reduced sensitivity to inertial noise
US6617750B2 · kind B2 · utility
69Cited by
25References
16Claims
0Family size
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Key dates
| Filing date | Mar 13, 2001 |
| Grant date | Sep 9, 2003 |
| Priority date | — |
| Expiry date | Jan 10, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/24181
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
Microelectricalmechanical systems (MEMS) manufactured on a microscopic scale using integrated circuit techniques may be used to measure a variety of parameters using electrical signals generated by the movement of small beams. Inertial noise may be canceled by the duplication of the beam structure for sensing of the acceleration to be subtracted from a similar beam structure used to measure the parameter of interest.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.