Scanning unit and scanning microscope having the same
US6617761B2 · kind B2 · utility
18Cited by
8References
47Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Mar 9, 2001 |
| Grant date | Sep 9, 2003 |
| Priority date | — |
| Expiry date | Mar 9, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/20264
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning unit for moving an object to be moved along at least one axis, which comprises a first actuator for moving the object along a first axis, the first actuator having a pair of end portions, and the object being attached to one of the end portions, the first actuator being held at a position in the vicinity of the center in dimension or the center of gravity thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.