Stage apparatus capable of suppressing rolling of a vibration isolation table
US6618121B2 · kind B2 · utility
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7Claims
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Key dates
| Filing date | Mar 20, 2002 |
| Grant date | Sep 9, 2003 |
| Priority date | — |
| Expiry date | Mar 20, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/49276
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
With a simple operation of inputting the target movement amount for the stage through the input device as input data, an acceleration signal is output from the control device to the acceleration/deceleration device based on the input data, and then n×T seconds after the acceleration signal is output, a deceleration signal having the same waveform as that of the acceleration signal and an opposite direction thereto is output.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.