Device for use with a micro-electro-mechanical system (MEMS) optical device and a method of manufacture therefor
US6618184B2 · kind B2 · utility
24Cited by
8References
55Claims
0Family size
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Key dates
| Filing date | Apr 3, 2001 |
| Grant date | Sep 9, 2003 |
| Priority date | — |
| Expiry date | Jun 24, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3594
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A device for use in a micro-electro-mechanical system (MEMS) optical system. The device includes a substrate having opposing first and second sides, wherein the first side has a light reflective optical layer located thereover, and the second side is an irregular surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.