Blazed micro-mechanical light modulator and array thereof
US6618187B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 11, 2001 |
| Grant date | Sep 9, 2003 |
| Priority date | — |
| Expiry date | Jul 11, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/1828
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A light valve of deformable grating type and a method for light modulation using the light valves is provided. The light valve of deformable grating type, includes at least three beams, one beam of the at least three beams being of a substantially fixed-position, and at least two beams of the at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of the staircase creating a predefined change in the phase of an impinging light beam, a first electrode and a second electrode, the electrodes transmitting electrostatic force to at least the deformable beams of the at least three beams. The beam of a substantially fixed-position may be deformable by electrostatic force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.