Planar sensor element
US6620302B1 · kind B1 · utility
1Cited by
4References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 12, 2002 |
| Grant date | Sep 16, 2003 |
| Priority date | — |
| Expiry date | May 30, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/4071
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a planar sensor element having a gas-containing layer situated between impermeable covering layers, the gas-containing layer is enclosed by a sealing frame over its entire periphery in a plane running between the covering layers, and at least one of the covering layers has a through hole for the exchange of air (reference gas) between the gas-containing layer and the ambient environment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.