System and method for determining and controlling contamination
US6620630B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 24, 2001 |
| Grant date | Sep 16, 2003 |
| Priority date | — |
| Expiry date | Sep 24, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D53/22
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A system and method for determining and removing contamination recognizes the need to determine contamination caused by a plurality of contaminants which includes refractory compounds, high molecular weight compounds and low molecular compounds operating at different rates. The system in accordance with a preferred embodiment of the present invention includes a collection device that emulates the environment of the surfaces of certain optical elements. The method for determining and preferably removing contamination includes maintaining an extended duration sampling time to enable the collection of a desirable mass of high molecular weight compounds. In a preferred embodiment, the collection device is operated past a breakthrough capacity to quantitatively measure high molecular weight compounds and other contaminants.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.