High-absorption wide-band pixel for bolometer arrays
US6621083B2 · kind B2 · utility
21Cited by
5References
24Claims
0Family size
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Key dates
| Filing date | Dec 29, 2000 |
| Grant date | Sep 16, 2003 |
| Priority date | — |
| Expiry date | Feb 10, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microbolometer array has pixels with a thin platform of silicon dioxide having a metal absorber layer, and having a resonant gap with a substrate reflector. The pixel resistor of vanadium oxide has low total resistance with metal contacts on opposite edges.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.