Discharge generating apparatus and discharge generating method
US6621227B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 6, 2000 |
| Grant date | Sep 16, 2003 |
| Priority date | — |
| Expiry date | Nov 6, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/0894
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Provided are a discharge generating apparatus, a discharge generating method, and a gas decomposing method capable of generating a large amount of an atmospheric plasma and increasing processing efficiency of a plasma processing, gas decomposition, or the like, by such a configuration that at least either one of high-potential and low-potential electrodes is comprised of a plurality of electrodes, a space between the electrodes is filled with an inorganic dielectric having a structure permitting flow of a gas, and a glow discharge is generated between the electrodes to change the gas existing between the electrodes, into a plasma under ordinary pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.