Patent · US Expired

Discharge generating apparatus and discharge generating method

US6621227B1 · kind B1 · utility

1Cited by
4References
30Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 6, 2000
Grant dateSep 16, 2003
Priority date
Expiry dateNov 6, 2020

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB01J2219/0894
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

Provided are a discharge generating apparatus, a discharge generating method, and a gas decomposing method capable of generating a large amount of an atmospheric plasma and increasing processing efficiency of a plasma processing, gas decomposition, or the like, by such a configuration that at least either one of high-potential and low-potential electrodes is comprised of a plurality of electrodes, a space between the electrodes is filled with an inorganic dielectric having a structure permitting flow of a gas, and a glow discharge is generated between the electrodes to change the gas existing between the electrodes, into a plasma under ordinary pressure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.