Micro-supercapacitor
US6621687B2 · kind B2 · utility
31Cited by
10References
7Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Sep 5, 2001 |
| Grant date | Sep 16, 2003 |
| Priority date | — |
| Expiry date | Sep 5, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microelectronic supercapacitor is amenable to being fabricated using micro electromechanical systems (MEMS) techniques. By utilizing MEMS techniques, the supercapacitor in accordance with the present invention can be formed with volumes <1 mm3. As such, such microelectronic supercapacitor is suitable for use in applications in which only a few millimeters are available for both a supercapacitor and an energy storage device, such as a battery.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.