Fluid waster diversion system
US6622745B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 7, 2002 |
| Grant date | Sep 23, 2003 |
| Priority date | — |
| Expiry date | Apr 1, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/271
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
A waste diversion system for diverting the effluent from a manufacturing process, such as polishing the surfaces of silicon wafers, has an electrically controlled diverter valve for receiving the effluent and diverting it either to a “dirty” output for waste treatment, or to a “clean” output for recycling or other treatment. To determine whether the effluent is “dirty” or “clean”, parameter sensors are located to sense particular parameters such as turbidity, conductivity, ORP, pH, or ion content, as desired. One sensor is located to sense the parameters of effluent flowing into the diverter valve; and the other sensor is located to sense the parameters (typically, the same parameters) of the flow from the “dirty” or waste side of the diverter valve. Only when both of the sensors indicate that the effluent is “clean” is a signal provided to the diverter valve to switch it to the clean output. As soon as the sensor on the input side of the valve indicates that the effluent is no longer “clean”, the valve control switches back to divert the effluent to the “dirty” or waste output. Only whe…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.