Variable pressure regulated flow controllers
US6622753B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 20, 2002 |
| Grant date | Sep 23, 2003 |
| Priority date | — |
| Expiry date | Aug 20, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87917
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A flow controller having a first and second stages of regulation. The first stage is a pressure regulation stage that maintains the pressure within an intermediate chamber (formed by a series of interconnected passageways and cavities) within a predetermined range above the pressure in an outlet port. The second stage maintains the flow rate within a predetermined range about a target flow rate. Both stages sample the pressure in the outlet port and automatically adjust the flow of fluid to ensure that fluctuations in pressure at the inlet and outlet ports do not affect the flow rate. The flow rate is set and controlled by a user determined setpoint. The pressure is regulated by one or more feedback systems. The feedback systems used may be mechanical or electromechanical based on a particular operating environment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.